DSpace Home
→
Електронні публікації
→
Фізико-математичний факультет
→
Кафедра інформатики та прикладної математики
→
View Item

Effect of oxygen agglomeration in polycrystaline Si (SIPOS) films

Lisovskyy, I. P.; Litovchenko, V. G.; Gnenyy, B. M.; Fussel, W.; Ків, Арнольд Юхимович; Соловйов, Володимир Миколайович; Maximova, Tatiana I.

URI: http://elibrary.kdpu.edu.ua/handle/0564/1032
https://doi.org/10.1023/A:1014385401282

Date: 2002

Abstract:

IR transmission spectra of SIPOS structures were measured and were investigated by using an approach of deconvolution of the Si-O stretching band into Gauss profiles. It was found that the space distribution of oxygen in SIPOS layers treated at elevated temperatures does not correspond to the prediction of RBM statistics. The oxygen agglomeration was observed. Optical microscopy was also applied to get additional information about the SIPOS films after treatment in HF solution. The peculiarities of the space distribution of oxygen in SIPOS films are explained on the basis of a computer simulation of free Si surface relaxation. A computer model has shown that a disordered phase arises in the Si surface layers at elevated temperatures. This phase is characterized by a large concentration of stressed and dangling bonds. There are lattice nodes with more than one dangling bond that are suitable sites for oxygen agglomeration.

Description:

1. P. A K H T E R , M. N. Z A K I R , A. B A I G , Semieond. Sci. Technology 6(1991) 135. 2. C. V A L K E R , ; . D. W H I T F I E L D a n d P. L. FE JE S , Mater. Res. Soc. Symp. ProtL 14 (1983) 187. 3. K. NAUKA, H. C, GATOS and J. LAGOVSKY, Appl. Phys. Lett. 43 (1983) 241. 4. PARK, M. DUECHER and H. J. M OELLER, in “ Proceedings of the Twelfth European Photovoltaic Solar Energy Conference, Amsterdam, June 1994", edited by J. Park (Elsevier Science, Kidlington, 1994) p. 996. 5. I. E. R EIS, CHUNG and H. M O E LER , in “ Proceedings of the Eleventh European Photovoltaic Solar Energy Conference Montreux September 1992" edited by J. Park (Elsevier Science, Kidlington, 1992) p. 499. 6. I. P. L I S O V S K I I , V. G. L I T O V C H E N K O , V. B. L O Z I N S K I I a n d G. I. STEBLOVSKII, Thin Solid Films 213 (1992) 164. 7. I. P. L I S O V S K I I , V. G. L IT O V C H E N K O , V. B. L O Z I N S K I I , V. P. M E L N IK a n d S. I. FROLOV , ibid. 247 (1994) 264. 8. I. P. L I S O V S K I I , V. G. L IT O V C H E N K O , V. B. L O Z I N S K I I , S. J. FROLOV, H. F L IE T N E R , W. F U S S EL and E. SCHM ID T, J. Non-Cryst. Solids 87 (1995) 91. 9. A. E. K IV , V. N . S O L O V I E V a n d T. I. M A X I M O V A , Semieond. Phys., Quantum Electron. Opipelectron. 3 (2000) 157. 10. H. H I B I N O , K. S U M I T O M O a n d T. F U K U D A , Phys. Rev. B58 (1999) 12587. 11. A. L E H M A N N , L. SCH U M A N N and K. H U B N ER , Phys. Status Solid B i l l (1984) 505. 12. P. G A W O R Z E W S K I, E. H IL D , F.-G . K I R S C H T and L. V ECSERN YES, Phys. Status Solid A 85 (1984) 133. 13. M. N A K A M U R A , Y. M O C H I Z U K I , K. U S A M I , Y. I T O H a n d T. N OZAK I, Solid State Commun. 50 (1984) 1079. 14. I. P. L IS O V S K Y Y , V. G„ L I T O V C H E N K O , B. M. G N E N Y Y . D. O. M AZ UR O V , W. F U S S E L , A. E. KIV, T. I. M A X IM O V A a n d V. N. S O L O V IE V , Phys. Low-Dim. Struct. 7/8 (2001) 113. 15. A. P. D O S T A N K O , E. S, A K U L I C H , V. YA. S H IR IP O V an d S. A. SOBOLEV, /. Appl. Spectrose 50 (1989) 436. 16. I. V. S V A D K O V S K I I , E. S. A K U L I C H , V. YA. S H I R I P O V a n d A. P. d o s t a n k o , ibid. 55(1991) 322. 17. G. V. S I D O R E N K O , N„ N. S Y R B U , A. T, G A P O N E N K O an d V. D. P R IL E P O V , Elektronnaya Tekhnika, Seria Materialy 256 (1991)49. 18. W. F U S S E L , W. H EN R IO N a n d R . SC H O L Z , Microelectr. Eng. 22 (1993) 355. 19. P. W. J A C O B S , A, E. K IV , R. M. B A L A B A Y , N . V. G R I S C H E N K O , V. V. C H IS L O V , J . I. D O N C H E V a n d S. V. PRIKHODNAYA, Comput. Model. New Technol. 2 (1998) 15. 20. F. H. S T I L L I N G E R and T. A. W E B E R , Phys. Rev. B 31 (1985) 52. 21. F. F. A B R A H A M and I. P. B A T R A , Surf. Sci. 163 (1985) L752.

Show full item record