Lisovskyy, I. P.; Litovchenko, V. G.; Gnenyy, B. M.; Fussel, W.; Ків, Арнольд Юхимович; Соловйов, Володимир Миколайович; Maximova, Tatiana I.
(Springer Science+Business Media, 2002)
IR transmission spectra of SIPOS structures were measured and were investigated by using an approach of deconvolution of the Si-O stretching band into Gauss profiles. It was found that the space distribution of oxygen in ...